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6.MDRAW


Integrated Systems Engineering
Development, Modeling, and Optimization of Microelectronic Processes, Devices, Circuits, and Systems

MDRAW NMOS exercise example
(NMOS MDRAW)

March, 2004

MDRAW

What is MDRAW
?
? ? ? ? ? MDRAW is the ISE 2D structure, doping and mesh editor. MDRAW is a front end to the ISE meshing engine MESH. With MDRAW you create device geometries by simply drawing them. With MDRAW you define analytic doping profiles interactively. With MDRAW you define meshing strategies interactively. With MDRAW you can edit and re-mesh device structures from the process simulation.

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MDRAW

MDRAW Basics
? Input Decks
1. MDRAW stores the device structure information in two separate files. The geometrical information is stored in a boundary file which has a name [basename].bnd. 2. The information about doping profiles and meshing strategies is stored in a command file which has a name [basename].cmd.

?

Output Files
– The final structure files that are loaded into the device simulator DESSIS are the grid file with a name [basename].grd and the data file with a name [basename].dat. The grid file contains the information about all the verticies (nodes) in the structure, their connectivity and what region and material they belong to. The data file contains the information about all the data sets, e.g., doping profiles, which are defined on those nodes.





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MDRAW

MDRAW Basics
? Launching MDRAW – Launch MDRAW from a command prompt with: > mdraw Launching MDRAW with an existing structure – Launch MDRAW from the command prompt with: > mdraw [basename]

?

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MDRAW

TARGET
? Use Mdraw to define one 100A NMOS device withtout using DIOS or Floops.

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MDRAW

Open New Project : NMOS_MDRAW
Right Click this

One New Project with MDRAW tool

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MDRAW

MDRAW Boundary Editor

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MDRAW

Edit Mdraw Boundary
Right Click this

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MDRAW

Mdraw: The Boundary Editor Interface
Menu Bar

Tool Box

Contact Area

Preference Area

Environment Area

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MDRAW

Exact Coordinate Mode
? In MDRAW you can draw free-hand. This is the default mode. However, in most cases it is advantageous to place points accurately. It is thus recommended to activate the Exact Coordinates option from the Preference Area. When this option is checked, a dialog window will open after each mouse placement in which you can specify the exact placement coordinates.

Click here

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MDRAW

Setting the Current Material
? To select the material for consecutive operations, open the Materials pulldown menu from the Menu Bar. Then click on the desired material, e.g., Silicon.

Step 1 : Click Material=Silicon

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MDRAW

Adding a Rectangle
? We are now creating the silicon substrate: – Select Add Rectangle from the Toolbox. Step 1 : Click “Add Rectangle”

Step 2 : Draw one rectangle Step 3 : Input the position value Step 4 : Re-Centering the Display /View/Zoom Reset

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MDRAW

Adding the Gate Oxide
? We are now adding a 100? gate oxide layer: – Set the current material to SiO2. Click here for details – Select Add Rectangle from the Toolbox.

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MDRAW

Zooming
? To see the gate oxide layer, select Zoom from the Toolbox and drag the pointer to draw a rectangle covering the approximate area of the interest. Click here for details on re-centering the view

Zoom In

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MDRAW

Adding the Gate Poly Silicon
? We are now adding the gate polysilicon layer: – Set the current material to PolySilicon. – Select Add Rectangle from theToolbox. Step 1 : Click Material=PolySilicon Step 2 : Click “Add rectangle”

Step 3 : Draw one rectangle

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MDRAW

Adding Non-Rectangular Regions : Ni Spacer
? We are now adding the nitride spacers. – Adding the first rectangular region. Then placing additional points and moving them to create rounded corners;

Draw a rectangular

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MDRAW

Add point and Move point
? Select Add Point from the Toolbox and click on several locations at the top and left edges of the nitride region. Step 1 : Click “Move Point” Step 1 : Click “Add Point” Step 2 : Click this Step 2 : Click this point

Step 3 : Input the value

Step 3 : Change it

Change it

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MDRAW

Undo and Redo
? Free-hand operations often need to be redone a few times to get them right. Open the Edit pull-down menu from the Menu Bar and select Undo or Redo as many times as needed.

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MDRAW

Naming Regions
? ? By default, MDRAW assigns names to regions in the following fashion: Region_1, Region_2, Region_3, and so forth. Here is how you can change region names: Select Information from the Toolbox and click on a layer of interest. A Region Information dialog window will appear which shows the material and the regionnames. Step 1 : Click “Information” Step 2 : Click any point in Substrate-Silicon

Step 3 : Change

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MDRAW

Setting Contacts
? Declare a contact by selecting Add Contact from the Contacts Area. A Contact Information dialog window will appear. Enter the name gate and click OK.

Step 1 : Click “Add contact”

Step 2 : Input contact Name

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MDRAW

Active Contact
? ? To change the active contact, open the pull-down menu by clicking on the black triangle and select one To select edges to be added to the currently active contact, select Set/Unset Contact from the Toolbox and click on the respective edges. A thick red line indicates the active contact. Gate

Step 3: Click here Source Step 2: Set Contact Substrate Drain

Step 1: Active “Gate”
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MDRAW

Saving the Boundary File
? The information about the device geometry is stored in a boundary file which has the extension *.bnd. To save a boundary file, open the File pull-down menu from the Menu Bar and select Save or Save As. If Save as “mdraw_mdr.bnd” A part of mdraw_mdr.bnd

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MDRAW

Save the Script File
? The Script file can be parameteried.
Script File : mdraw_mdr.tcl

? You can run “Mdraw –L mdraw_mdr.tcl” to produce the mdraw_mdr.bnd
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MDRAW

MDRAW Doping Editor

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MDRAW

Adding a Constant Substrate Doping Profile
? ? Select Add Constant P. from the Toolbox. Press and hold the left mouse button and drag the pointer to draw a rectangle covering the approximate area of the substrate, then release the mouse button.

draw a rectangle

Step 1 : Click the “Exact coordinates”

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MDRAW

Adding a Constant Poly Doping Profile
? ? Select Add Constant P. from the Toolbox. Press and hold the left mouse button and drag the pointer to draw a rectangle covering the approximate area of the substrate, then release the mouse button. draw a rectangle

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MDRAW

Adding an Analytical Doping Profile : Source
? ? Select Add Analytical P. from the Toolbox. Press and hold the left mouse button and drag the pointer to draw a line from left to right along the approximate extension of the source contact, then release the mouse. draw a line

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MDRAW

Adding an Analytical Doping Profile : Drain
? ? Select Add Analytical P. from the Toolbox. Press and hold the left mouse button and drag the pointer to draw a line from left to right along the approximate extension of the source contact, then release the mouse. draw a line

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MDRAW

Build Mesh & Show Mesh

Push this to show Mesh Push this with/without showing Mesh

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MDRAW

Global Refinement
Step 1 : Push this Step 2 Mesh after Global Refinement

Step 3

Step 4

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MDRAW

Channel Multibox
? Select Add Multibox from the Tool Box
draw a rectangle

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MDRAW

Poly Multibox
? Select Add Multibox from the Tool Box
draw a rectangle

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MDRAW

Show Mesh Numbers

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MDRAW

Save the Command file

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MDRAW

Mdraw_mdr.cmd (1)
Title "Untitled" Definitions { # Refinement regions Refinement "Default Region" { MaxElementSize = (0.3 0.3 ) MinElementSize = (0.005 0.005 ) RefineFunction = MaxTransDiff(Variable = "DopingConcentration", Value = 1) } Multibox "Channel_box" { MaxElementSize = (0.07 0.03 ) MinElementSize = (0.005 0.0002 ) Ratio = (1 1.2 ) } Multibox "Poly_box" { MaxElementSize = (0.1 0.02 ) MinElementSize = (0.005 0.0003 ) Ratio = (1 -1.25 ) } # Profiles Constant "Substrate_doping" { Species = "BoronActiveConcentration" Value = 1e+017 } Constant "Poly_doping" { Species = "ArsenicActiveConcentration" Value = 1e+020 } AnalyticalProfile "Source_doping" { Species = "ArsenicActiveConcentration" Function = Gauss(PeakPos = 0, PeakVal = 1e+020, ValueAtDepth = 1e+017, Depth = 0.3) LateralFunction = Gauss(Factor = 0.8) } AnalyticalProfile "Drain_doping" { Species = "ArsenicActiveConcentration" Function = Gauss(PeakPos = 0, PeakVal = 1e+020, ValueAtDepth = 1e+017, Depth = 0.3) LateralFunction = Gauss(Factor = 0.8) } }

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MDRAW

Mdraw_mdr.cmd (2)
Placements { # Refinement regions Refinement "Default Region" { Reference = "Default Region" # Default region } Multibox "Channel_box" { Reference = "Channel_box" RefineWindow = rectangle [( -0.55 , 0 ), ( 0.55 , 0.3 )] } Multibox "Poly_box" { Reference = "Poly_box" RefineWindow = rectangle [( -0.5 , -0.2 ), ( 0.5 , -0.01 )] } # Profiles Constant "Substrate_doping" { Reference = "Substrate_doping" EvaluateWindow { Element = rectangle [( -1.5 0 ) , ( 1.5 3 )] DecayLength = 0 } } } Integrated Systems Engineering Constant "Poly_doping" { Reference = "Poly_doping" Replace EvaluateWindow { Element = rectangle [( -0.5 -0.2 ) , ( 0.5 -0.01 )] DecayLength = 0 } } AnalyticalProfile "Source_doping" { Reference = "Source_doping" ReferenceElement { Element = line [( -1.5 0 ) , ( -0.5 0 )] Direction = positive } } AnalyticalProfile "Drain_doping" { Reference = "Drain_doping" ReferenceElement { Element = line [( 0.5 0 ) , ( 1.5 0 )] Direction = positive } }

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MDRAW

Change the Executive mode
“Right” Click This

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MDRAW

Run MDRAW in batch mode
Step 1 : Run Mdraw

The mesh and doping after Mdraw remesh Step 2 : View Pictures

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Integrated Systems Engineering
Development, Modeling, and Optimization of Microelectronic Processes, Devices, Circuits, and Systems

Copyright ? 2003 ISE Integrated Systems Engineering AG

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